11/2/2010	1:49:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2010	1:49:07 PM	Recipe started at 1:49 PM
11/2/2010	1:49:07 PM	H2 valve closed
11/2/2010	1:49:07 PM	BCl3 valve closed
11/2/2010	1:49:07 PM	PH3 valve closed
11/2/2010	1:49:07 PM	SiCl4 pre valve closed
11/2/2010	1:49:07 PM	SiCl4 post valve closed
11/2/2010	1:49:07 PM	Main Vac valve closed
11/2/2010	1:49:07 PM	Bypass valve closed
11/2/2010	1:49:07 PM	Bubbler valve closed
11/2/2010	1:49:07 PM	Helium valve opened
11/2/2010	1:49:07 PM	Helium MFC set to  500.000000
11/2/2010	1:49:07 PM	H2 MFC set to  0.000000
11/2/2010	1:49:07 PM	BCl3 MFC set to  0.000000
11/2/2010	1:49:07 PM	PHl3 MFC set to  0.000000
11/2/2010	1:49:07 PM	SiCl4 MFC set to  0.000000
11/2/2010	1:49:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	1:49:08 PM	Tube furnace set to 0
11/2/2010	1:49:45 PM	Run aborted at 1:49 PM
11/2/2010	1:49:45 PM	Helium valve closed
11/2/2010	1:49:45 PM	H2 valve closed
11/2/2010	1:49:45 PM	BCl3 valve closed
11/2/2010	1:49:45 PM	PH3 valve closed
11/2/2010	1:49:45 PM	SiCl4 pre valve closed
11/2/2010	1:49:45 PM	SiCl4 post valve closed
11/2/2010	1:49:45 PM	Bypass valve closed
11/2/2010	1:49:45 PM	Main Vac valve closed
11/2/2010	1:49:45 PM	Bubbler valve closed
11/2/2010	1:49:45 PM	Helium MFC set to  0.000000
11/2/2010	1:49:45 PM	H2 MFC set to  0.000000
11/2/2010	1:49:45 PM	BCl3 MFC set to  0.000000
11/2/2010	1:49:45 PM	PHl3 MFC set to  0.000000
11/2/2010	1:49:45 PM	SiCl4 MFC set to  0.000000
11/2/2010	1:49:45 PM	Tube furnace set to 0
11/2/2010	1:49:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2010	2:14:28 PM	Bypass valve opened
11/2/2010	2:14:29 PM	Main Vac valve opened
11/2/2010	2:34:19 PM	H2 valve opened
11/2/2010	2:34:22 PM	H2 MFC set to  500.000000
11/2/2010	2:36:06 PM	H2 valve closed
11/2/2010	2:36:26 PM	H2 valve opened
11/2/2010	2:39:52 PM	H2 valve closed
11/2/2010	2:39:54 PM	H2 MFC set to  0.000000
11/2/2010	2:39:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2010	2:39:58 PM	Recipe started at 2:39 PM
11/2/2010	2:39:58 PM	H2 valve closed
11/2/2010	2:39:58 PM	BCl3 valve closed
11/2/2010	2:39:58 PM	PH3 valve closed
11/2/2010	2:39:58 PM	SiCl4 pre valve closed
11/2/2010	2:39:58 PM	SiCl4 post valve closed
11/2/2010	2:39:58 PM	Main Vac valve closed
11/2/2010	2:39:58 PM	Bypass valve closed
11/2/2010	2:39:58 PM	Bubbler valve closed
11/2/2010	2:39:58 PM	Helium valve opened
11/2/2010	2:39:58 PM	Helium MFC set to  500.000000
11/2/2010	2:39:58 PM	H2 MFC set to  0.000000
11/2/2010	2:39:58 PM	BCl3 MFC set to  0.000000
11/2/2010	2:39:58 PM	PHl3 MFC set to  0.000000
11/2/2010	2:39:58 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:39:58 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:39:58 PM	Tube furnace set to 0
11/2/2010	2:41:18 PM	Helium valve closed
11/2/2010	2:41:18 PM	H2 valve closed
11/2/2010	2:41:18 PM	BCl3 valve closed
11/2/2010	2:41:18 PM	PH3 valve closed
11/2/2010	2:41:18 PM	SiCl4 pre valve closed
11/2/2010	2:41:18 PM	SiCl4 post valve closed
11/2/2010	2:41:18 PM	Main Vac valve closed
11/2/2010	2:41:18 PM	Bypass valve closed
11/2/2010	2:41:18 PM	Bubbler valve closed
11/2/2010	2:41:18 PM	Helium MFC set to  0.000000
11/2/2010	2:41:18 PM	H2 MFC set to  0.000000
11/2/2010	2:41:18 PM	BCl3 MFC set to  0.000000
11/2/2010	2:41:18 PM	PHl3 MFC set to  0.000000
11/2/2010	2:41:18 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:41:18 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:41:18 PM	Tube furnace set to 0
11/2/2010	2:41:19 PM	Run finished at 2:41 PM
11/2/2010	2:41:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2010	2:43:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2010	2:43:01 PM	Recipe started at 2:43 PM
11/2/2010	2:43:01 PM	Helium valve closed
11/2/2010	2:43:01 PM	H2 valve closed
11/2/2010	2:43:01 PM	BCl3 valve closed
11/2/2010	2:43:01 PM	PH3 valve closed
11/2/2010	2:43:01 PM	SiCl4 pre valve closed
11/2/2010	2:43:01 PM	SiCl4 post valve closed
11/2/2010	2:43:01 PM	Main Vac valve closed
11/2/2010	2:43:01 PM	Bubbler valve closed
11/2/2010	2:43:01 PM	Bypass valve opened
11/2/2010	2:43:01 PM	Helium MFC set to  0.000000
11/2/2010	2:43:01 PM	H2 MFC set to  0.000000
11/2/2010	2:43:01 PM	BCl3 MFC set to  0.000000
11/2/2010	2:43:01 PM	PHl3 MFC set to  0.000000
11/2/2010	2:43:01 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:43:01 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:43:01 PM	Tube furnace set to 0
11/2/2010	2:43:51 PM	Helium valve closed
11/2/2010	2:43:51 PM	H2 valve closed
11/2/2010	2:43:51 PM	BCl3 valve closed
11/2/2010	2:43:51 PM	PH3 valve closed
11/2/2010	2:43:51 PM	SiCl4 pre valve closed
11/2/2010	2:43:51 PM	SiCl4 post valve closed
11/2/2010	2:43:51 PM	Bubbler valve closed
11/2/2010	2:43:51 PM	Main Vac valve opened
11/2/2010	2:43:51 PM	Bypass valve opened
11/2/2010	2:43:51 PM	Helium MFC set to  0.000000
11/2/2010	2:43:51 PM	H2 MFC set to  0.000000
11/2/2010	2:43:51 PM	BCl3 MFC set to  0.000000
11/2/2010	2:43:51 PM	PHl3 MFC set to  0.000000
11/2/2010	2:43:51 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:43:51 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:43:52 PM	Tube furnace set to 0
11/2/2010	2:43:52 PM	Run finished at 2:43 PM
11/2/2010	2:43:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2010	2:48:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/2/2010	2:48:20 PM	Recipe started at 2:48 PM
11/2/2010	2:48:20 PM	Helium valve closed
11/2/2010	2:48:20 PM	H2 valve closed
11/2/2010	2:48:20 PM	BCl3 valve closed
11/2/2010	2:48:20 PM	PH3 valve closed
11/2/2010	2:48:20 PM	SiCl4 pre valve closed
11/2/2010	2:48:20 PM	SiCl4 post valve closed
11/2/2010	2:48:20 PM	Main Vac valve closed
11/2/2010	2:48:20 PM	Bubbler valve closed
11/2/2010	2:48:20 PM	Bypass valve opened
11/2/2010	2:48:20 PM	Helium MFC set to  0.000000
11/2/2010	2:48:20 PM	H2 MFC set to  0.000000
11/2/2010	2:48:20 PM	BCl3 MFC set to  0.000000
11/2/2010	2:48:20 PM	PHl3 MFC set to  0.000000
11/2/2010	2:48:20 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:48:20 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:48:20 PM	Tube furnace set to 0
11/2/2010	2:48:20 PM	Helium valve closed
11/2/2010	2:48:20 PM	H2 valve closed
11/2/2010	2:48:20 PM	BCl3 valve closed
11/2/2010	2:48:20 PM	PH3 valve closed
11/2/2010	2:48:20 PM	SiCl4 pre valve closed
11/2/2010	2:48:20 PM	SiCl4 post valve closed
11/2/2010	2:48:20 PM	Bubbler valve closed
11/2/2010	2:48:20 PM	Main Vac valve opened
11/2/2010	2:48:20 PM	Bypass valve opened
11/2/2010	2:48:20 PM	Helium MFC set to  0.000000
11/2/2010	2:48:20 PM	H2 MFC set to  0.000000
11/2/2010	2:48:20 PM	BCl3 MFC set to  0.000000
11/2/2010	2:48:20 PM	PHl3 MFC set to  0.000000
11/2/2010	2:48:20 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:48:20 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:48:20 PM	Tube furnace set to 0
11/2/2010	2:49:20 PM	H2 valve closed
11/2/2010	2:49:20 PM	BCl3 valve closed
11/2/2010	2:49:20 PM	PH3 valve closed
11/2/2010	2:49:20 PM	SiCl4 pre valve closed
11/2/2010	2:49:20 PM	SiCl4 post valve closed
11/2/2010	2:49:20 PM	Bubbler valve closed
11/2/2010	2:49:20 PM	Helium valve opened
11/2/2010	2:49:20 PM	Main Vac valve opened
11/2/2010	2:49:20 PM	Bypass valve opened
11/2/2010	2:49:20 PM	Helium MFC set to  100.000000
11/2/2010	2:49:20 PM	H2 MFC set to  0.000000
11/2/2010	2:49:20 PM	BCl3 MFC set to  0.000000
11/2/2010	2:49:20 PM	PHl3 MFC set to  0.000000
11/2/2010	2:49:20 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:49:20 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:49:20 PM	Tube furnace set to 0
11/2/2010	2:50:21 PM	Helium valve closed
11/2/2010	2:50:21 PM	H2 valve closed
11/2/2010	2:50:21 PM	BCl3 valve closed
11/2/2010	2:50:21 PM	PH3 valve closed
11/2/2010	2:50:21 PM	SiCl4 pre valve closed
11/2/2010	2:50:21 PM	SiCl4 post valve closed
11/2/2010	2:50:21 PM	Bubbler valve closed
11/2/2010	2:50:21 PM	Main Vac valve opened
11/2/2010	2:50:21 PM	Bypass valve opened
11/2/2010	2:50:21 PM	Helium MFC set to  0.000000
11/2/2010	2:50:21 PM	H2 MFC set to  0.000000
11/2/2010	2:50:21 PM	BCl3 MFC set to  0.000000
11/2/2010	2:50:21 PM	PHl3 MFC set to  0.000000
11/2/2010	2:50:21 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:50:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:50:21 PM	Tube furnace set to 0
11/2/2010	2:51:21 PM	H2 valve closed
11/2/2010	2:51:21 PM	BCl3 valve closed
11/2/2010	2:51:21 PM	PH3 valve closed
11/2/2010	2:51:21 PM	SiCl4 pre valve closed
11/2/2010	2:51:21 PM	SiCl4 post valve closed
11/2/2010	2:51:21 PM	Bubbler valve closed
11/2/2010	2:51:21 PM	Helium valve opened
11/2/2010	2:51:21 PM	Main Vac valve opened
11/2/2010	2:51:21 PM	Bypass valve opened
11/2/2010	2:51:21 PM	Helium MFC set to  100.000000
11/2/2010	2:51:21 PM	H2 MFC set to  0.000000
11/2/2010	2:51:21 PM	BCl3 MFC set to  0.000000
11/2/2010	2:51:21 PM	PHl3 MFC set to  0.000000
11/2/2010	2:51:21 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:51:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:51:21 PM	Tube furnace set to 0
11/2/2010	2:52:21 PM	Helium valve closed
11/2/2010	2:52:21 PM	H2 valve closed
11/2/2010	2:52:21 PM	BCl3 valve closed
11/2/2010	2:52:21 PM	PH3 valve closed
11/2/2010	2:52:21 PM	SiCl4 pre valve closed
11/2/2010	2:52:21 PM	SiCl4 post valve closed
11/2/2010	2:52:21 PM	Bubbler valve closed
11/2/2010	2:52:21 PM	Main Vac valve opened
11/2/2010	2:52:21 PM	Bypass valve opened
11/2/2010	2:52:21 PM	Helium MFC set to  0.000000
11/2/2010	2:52:21 PM	H2 MFC set to  0.000000
11/2/2010	2:52:21 PM	BCl3 MFC set to  0.000000
11/2/2010	2:52:21 PM	PHl3 MFC set to  0.000000
11/2/2010	2:52:21 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:52:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:52:21 PM	Tube furnace set to 0
11/2/2010	2:53:21 PM	H2 valve closed
11/2/2010	2:53:21 PM	BCl3 valve closed
11/2/2010	2:53:21 PM	PH3 valve closed
11/2/2010	2:53:21 PM	SiCl4 pre valve closed
11/2/2010	2:53:21 PM	SiCl4 post valve closed
11/2/2010	2:53:21 PM	Bubbler valve closed
11/2/2010	2:53:21 PM	Helium valve opened
11/2/2010	2:53:21 PM	Main Vac valve opened
11/2/2010	2:53:21 PM	Bypass valve opened
11/2/2010	2:53:21 PM	Helium MFC set to  100.000000
11/2/2010	2:53:21 PM	H2 MFC set to  0.000000
11/2/2010	2:53:21 PM	BCl3 MFC set to  0.000000
11/2/2010	2:53:21 PM	PHl3 MFC set to  0.000000
11/2/2010	2:53:21 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:53:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:53:21 PM	Tube furnace set to 0
11/2/2010	2:54:21 PM	Helium valve closed
11/2/2010	2:54:21 PM	H2 valve closed
11/2/2010	2:54:21 PM	BCl3 valve closed
11/2/2010	2:54:21 PM	PH3 valve closed
11/2/2010	2:54:21 PM	SiCl4 pre valve closed
11/2/2010	2:54:21 PM	SiCl4 post valve closed
11/2/2010	2:54:21 PM	Bubbler valve closed
11/2/2010	2:54:21 PM	Main Vac valve opened
11/2/2010	2:54:21 PM	Bypass valve opened
11/2/2010	2:54:21 PM	Helium MFC set to  0.000000
11/2/2010	2:54:21 PM	H2 MFC set to  0.000000
11/2/2010	2:54:21 PM	BCl3 MFC set to  0.000000
11/2/2010	2:54:21 PM	PHl3 MFC set to  0.000000
11/2/2010	2:54:21 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:54:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:54:21 PM	Tube furnace set to 0
11/2/2010	2:55:21 PM	H2 valve closed
11/2/2010	2:55:21 PM	BCl3 valve closed
11/2/2010	2:55:21 PM	PH3 valve closed
11/2/2010	2:55:21 PM	SiCl4 pre valve closed
11/2/2010	2:55:21 PM	SiCl4 post valve closed
11/2/2010	2:55:21 PM	Bubbler valve closed
11/2/2010	2:55:22 PM	Helium valve opened
11/2/2010	2:55:22 PM	Main Vac valve opened
11/2/2010	2:55:22 PM	Bypass valve opened
11/2/2010	2:55:22 PM	Helium MFC set to  100.000000
11/2/2010	2:55:22 PM	H2 MFC set to  0.000000
11/2/2010	2:55:22 PM	BCl3 MFC set to  0.000000
11/2/2010	2:55:22 PM	PHl3 MFC set to  0.000000
11/2/2010	2:55:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:55:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:55:22 PM	Tube furnace set to 0
11/2/2010	2:56:22 PM	Helium valve closed
11/2/2010	2:56:22 PM	H2 valve closed
11/2/2010	2:56:22 PM	BCl3 valve closed
11/2/2010	2:56:22 PM	PH3 valve closed
11/2/2010	2:56:22 PM	SiCl4 pre valve closed
11/2/2010	2:56:22 PM	SiCl4 post valve closed
11/2/2010	2:56:22 PM	Bubbler valve closed
11/2/2010	2:56:22 PM	Main Vac valve opened
11/2/2010	2:56:22 PM	Bypass valve opened
11/2/2010	2:56:22 PM	Helium MFC set to  0.000000
11/2/2010	2:56:22 PM	H2 MFC set to  0.000000
11/2/2010	2:56:22 PM	BCl3 MFC set to  0.000000
11/2/2010	2:56:22 PM	PHl3 MFC set to  0.000000
11/2/2010	2:56:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:56:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:56:22 PM	Tube furnace set to 0
11/2/2010	2:57:22 PM	H2 valve closed
11/2/2010	2:57:22 PM	BCl3 valve closed
11/2/2010	2:57:22 PM	PH3 valve closed
11/2/2010	2:57:22 PM	SiCl4 pre valve closed
11/2/2010	2:57:22 PM	SiCl4 post valve closed
11/2/2010	2:57:22 PM	Bubbler valve closed
11/2/2010	2:57:22 PM	Helium valve opened
11/2/2010	2:57:22 PM	Main Vac valve opened
11/2/2010	2:57:22 PM	Bypass valve opened
11/2/2010	2:57:22 PM	Helium MFC set to  100.000000
11/2/2010	2:57:22 PM	H2 MFC set to  0.000000
11/2/2010	2:57:22 PM	BCl3 MFC set to  0.000000
11/2/2010	2:57:22 PM	PHl3 MFC set to  0.000000
11/2/2010	2:57:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:57:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:57:22 PM	Tube furnace set to 0
11/2/2010	2:58:22 PM	Helium valve closed
11/2/2010	2:58:22 PM	H2 valve closed
11/2/2010	2:58:22 PM	BCl3 valve closed
11/2/2010	2:58:22 PM	PH3 valve closed
11/2/2010	2:58:22 PM	SiCl4 pre valve closed
11/2/2010	2:58:22 PM	SiCl4 post valve closed
11/2/2010	2:58:22 PM	Bubbler valve closed
11/2/2010	2:58:22 PM	Main Vac valve opened
11/2/2010	2:58:22 PM	Bypass valve opened
11/2/2010	2:58:22 PM	Helium MFC set to  0.000000
11/2/2010	2:58:22 PM	H2 MFC set to  0.000000
11/2/2010	2:58:22 PM	BCl3 MFC set to  0.000000
11/2/2010	2:58:22 PM	PHl3 MFC set to  0.000000
11/2/2010	2:58:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:58:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:58:22 PM	Tube furnace set to 0
11/2/2010	2:59:22 PM	H2 valve closed
11/2/2010	2:59:22 PM	BCl3 valve closed
11/2/2010	2:59:22 PM	PH3 valve closed
11/2/2010	2:59:22 PM	SiCl4 pre valve closed
11/2/2010	2:59:22 PM	SiCl4 post valve closed
11/2/2010	2:59:22 PM	Bubbler valve closed
11/2/2010	2:59:22 PM	Helium valve opened
11/2/2010	2:59:22 PM	Main Vac valve opened
11/2/2010	2:59:22 PM	Bypass valve opened
11/2/2010	2:59:22 PM	Helium MFC set to  100.000000
11/2/2010	2:59:22 PM	H2 MFC set to  0.000000
11/2/2010	2:59:22 PM	BCl3 MFC set to  0.000000
11/2/2010	2:59:22 PM	PHl3 MFC set to  0.000000
11/2/2010	2:59:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	2:59:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	2:59:22 PM	Tube furnace set to 0
11/2/2010	3:00:22 PM	Helium valve closed
11/2/2010	3:00:22 PM	H2 valve closed
11/2/2010	3:00:22 PM	BCl3 valve closed
11/2/2010	3:00:22 PM	PH3 valve closed
11/2/2010	3:00:22 PM	SiCl4 pre valve closed
11/2/2010	3:00:22 PM	SiCl4 post valve closed
11/2/2010	3:00:22 PM	Bubbler valve closed
11/2/2010	3:00:22 PM	Main Vac valve opened
11/2/2010	3:00:22 PM	Bypass valve opened
11/2/2010	3:00:22 PM	Helium MFC set to  0.000000
11/2/2010	3:00:22 PM	H2 MFC set to  0.000000
11/2/2010	3:00:22 PM	BCl3 MFC set to  0.000000
11/2/2010	3:00:22 PM	PHl3 MFC set to  0.000000
11/2/2010	3:00:22 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:00:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:00:23 PM	Tube furnace set to 0
11/2/2010	3:01:23 PM	H2 valve closed
11/2/2010	3:01:23 PM	BCl3 valve closed
11/2/2010	3:01:23 PM	PH3 valve closed
11/2/2010	3:01:23 PM	SiCl4 pre valve closed
11/2/2010	3:01:23 PM	SiCl4 post valve closed
11/2/2010	3:01:23 PM	Bubbler valve closed
11/2/2010	3:01:23 PM	Helium valve opened
11/2/2010	3:01:23 PM	Main Vac valve opened
11/2/2010	3:01:23 PM	Bypass valve opened
11/2/2010	3:01:23 PM	Helium MFC set to  100.000000
11/2/2010	3:01:23 PM	H2 MFC set to  0.000000
11/2/2010	3:01:23 PM	BCl3 MFC set to  0.000000
11/2/2010	3:01:23 PM	PHl3 MFC set to  0.000000
11/2/2010	3:01:23 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:01:23 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:01:23 PM	Tube furnace set to 0
11/2/2010	3:02:23 PM	Helium valve closed
11/2/2010	3:02:23 PM	H2 valve closed
11/2/2010	3:02:23 PM	BCl3 valve closed
11/2/2010	3:02:23 PM	PH3 valve closed
11/2/2010	3:02:23 PM	SiCl4 pre valve closed
11/2/2010	3:02:23 PM	SiCl4 post valve closed
11/2/2010	3:02:23 PM	Bubbler valve closed
11/2/2010	3:02:23 PM	Main Vac valve opened
11/2/2010	3:02:23 PM	Bypass valve opened
11/2/2010	3:02:23 PM	Helium MFC set to  0.000000
11/2/2010	3:02:23 PM	H2 MFC set to  0.000000
11/2/2010	3:02:23 PM	BCl3 MFC set to  0.000000
11/2/2010	3:02:23 PM	PHl3 MFC set to  0.000000
11/2/2010	3:02:23 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:02:23 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:02:23 PM	Tube furnace set to 0
11/2/2010	3:03:23 PM	H2 valve closed
11/2/2010	3:03:23 PM	BCl3 valve closed
11/2/2010	3:03:23 PM	PH3 valve closed
11/2/2010	3:03:23 PM	SiCl4 pre valve closed
11/2/2010	3:03:23 PM	SiCl4 post valve closed
11/2/2010	3:03:23 PM	Bubbler valve closed
11/2/2010	3:03:23 PM	Helium valve opened
11/2/2010	3:03:23 PM	Main Vac valve opened
11/2/2010	3:03:23 PM	Bypass valve opened
11/2/2010	3:03:23 PM	Helium MFC set to  100.000000
11/2/2010	3:03:23 PM	H2 MFC set to  0.000000
11/2/2010	3:03:23 PM	BCl3 MFC set to  0.000000
11/2/2010	3:03:23 PM	PHl3 MFC set to  0.000000
11/2/2010	3:03:23 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:03:23 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:03:23 PM	Tube furnace set to 0
11/2/2010	3:04:23 PM	Helium valve closed
11/2/2010	3:04:23 PM	H2 valve closed
11/2/2010	3:04:23 PM	BCl3 valve closed
11/2/2010	3:04:23 PM	PH3 valve closed
11/2/2010	3:04:23 PM	SiCl4 pre valve closed
11/2/2010	3:04:23 PM	SiCl4 post valve closed
11/2/2010	3:04:23 PM	Bubbler valve closed
11/2/2010	3:04:23 PM	Main Vac valve opened
11/2/2010	3:04:23 PM	Bypass valve opened
11/2/2010	3:04:23 PM	Helium MFC set to  0.000000
11/2/2010	3:04:23 PM	H2 MFC set to  0.000000
11/2/2010	3:04:23 PM	BCl3 MFC set to  0.000000
11/2/2010	3:04:23 PM	PHl3 MFC set to  0.000000
11/2/2010	3:04:23 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:04:23 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:04:23 PM	Tube furnace set to 0
11/2/2010	3:05:23 PM	H2 valve closed
11/2/2010	3:05:23 PM	BCl3 valve closed
11/2/2010	3:05:23 PM	PH3 valve closed
11/2/2010	3:05:23 PM	SiCl4 pre valve closed
11/2/2010	3:05:23 PM	SiCl4 post valve closed
11/2/2010	3:05:23 PM	Bubbler valve closed
11/2/2010	3:05:23 PM	Helium valve opened
11/2/2010	3:05:23 PM	Main Vac valve opened
11/2/2010	3:05:23 PM	Bypass valve opened
11/2/2010	3:05:23 PM	Helium MFC set to  100.000000
11/2/2010	3:05:23 PM	H2 MFC set to  0.000000
11/2/2010	3:05:23 PM	BCl3 MFC set to  0.000000
11/2/2010	3:05:23 PM	PHl3 MFC set to  0.000000
11/2/2010	3:05:23 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:05:23 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:05:24 PM	Tube furnace set to 0
11/2/2010	3:06:24 PM	Helium valve closed
11/2/2010	3:06:24 PM	H2 valve closed
11/2/2010	3:06:24 PM	BCl3 valve closed
11/2/2010	3:06:24 PM	PH3 valve closed
11/2/2010	3:06:24 PM	SiCl4 pre valve closed
11/2/2010	3:06:24 PM	SiCl4 post valve closed
11/2/2010	3:06:24 PM	Bubbler valve closed
11/2/2010	3:06:24 PM	Main Vac valve opened
11/2/2010	3:06:24 PM	Bypass valve opened
11/2/2010	3:06:24 PM	Helium MFC set to  0.000000
11/2/2010	3:06:24 PM	H2 MFC set to  0.000000
11/2/2010	3:06:24 PM	BCl3 MFC set to  0.000000
11/2/2010	3:06:24 PM	PHl3 MFC set to  0.000000
11/2/2010	3:06:24 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:06:24 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:06:24 PM	Tube furnace set to 0
11/2/2010	3:07:24 PM	H2 valve closed
11/2/2010	3:07:24 PM	BCl3 valve closed
11/2/2010	3:07:24 PM	PH3 valve closed
11/2/2010	3:07:24 PM	SiCl4 pre valve closed
11/2/2010	3:07:24 PM	SiCl4 post valve closed
11/2/2010	3:07:24 PM	Bubbler valve closed
11/2/2010	3:07:24 PM	Helium valve opened
11/2/2010	3:07:24 PM	Main Vac valve opened
11/2/2010	3:07:24 PM	Bypass valve opened
11/2/2010	3:07:24 PM	Helium MFC set to  100.000000
11/2/2010	3:07:24 PM	H2 MFC set to  0.000000
11/2/2010	3:07:24 PM	BCl3 MFC set to  0.000000
11/2/2010	3:07:24 PM	PHl3 MFC set to  0.000000
11/2/2010	3:07:24 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:07:24 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:07:24 PM	Tube furnace set to 0
11/2/2010	3:08:24 PM	Helium valve closed
11/2/2010	3:08:24 PM	H2 valve closed
11/2/2010	3:08:24 PM	BCl3 valve closed
11/2/2010	3:08:24 PM	PH3 valve closed
11/2/2010	3:08:24 PM	SiCl4 pre valve closed
11/2/2010	3:08:24 PM	SiCl4 post valve closed
11/2/2010	3:08:24 PM	Bubbler valve closed
11/2/2010	3:08:24 PM	Main Vac valve opened
11/2/2010	3:08:24 PM	Bypass valve opened
11/2/2010	3:08:24 PM	Helium MFC set to  0.000000
11/2/2010	3:08:24 PM	H2 MFC set to  0.000000
11/2/2010	3:08:24 PM	BCl3 MFC set to  0.000000
11/2/2010	3:08:24 PM	PHl3 MFC set to  0.000000
11/2/2010	3:08:24 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:08:24 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:08:24 PM	Tube furnace set to 0
11/2/2010	3:08:25 PM	Run finished at 3:08 PM
11/2/2010	3:08:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/2/2010	3:45:18 PM	Tube furnace set to 100
11/2/2010	3:45:18 PM	Bypass valve closed
11/2/2010	3:45:19 PM	Main Vac valve closed
11/2/2010	3:45:24 PM	Main Vac valve opened
11/2/2010	3:45:24 PM	Bypass valve opened
11/2/2010	3:45:35 PM	Tube furnace set to 0
11/2/2010	3:45:44 PM	Recipe started at 3:45 PM
11/2/2010	3:45:44 PM	Helium valve closed
11/2/2010	3:45:44 PM	BCl3 valve closed
11/2/2010	3:45:44 PM	PH3 valve closed
11/2/2010	3:45:44 PM	SiCl4 pre valve closed
11/2/2010	3:45:44 PM	SiCl4 post valve closed
11/2/2010	3:45:44 PM	Main Vac valve closed
11/2/2010	3:45:44 PM	Bypass valve closed
11/2/2010	3:45:44 PM	Bubbler valve closed
11/2/2010	3:45:44 PM	H2 valve opened
11/2/2010	3:45:44 PM	Helium MFC set to  0.000000
11/2/2010	3:45:44 PM	H2 MFC set to  500.000000
11/2/2010	3:45:44 PM	BCl3 MFC set to  0.000000
11/2/2010	3:45:44 PM	PHl3 MFC set to  0.000000
11/2/2010	3:45:44 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:45:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:45:44 PM	Tube furnace set to 0
11/2/2010	3:47:08 PM	Helium valve closed
11/2/2010	3:47:08 PM	BCl3 valve closed
11/2/2010	3:47:08 PM	PH3 valve closed
11/2/2010	3:47:08 PM	SiCl4 pre valve closed
11/2/2010	3:47:08 PM	SiCl4 post valve closed
11/2/2010	3:47:08 PM	Main Vac valve closed
11/2/2010	3:47:08 PM	Bypass valve closed
11/2/2010	3:47:08 PM	H2 valve opened
11/2/2010	3:47:08 PM	Bubbler valve opened
11/2/2010	3:47:08 PM	Helium MFC set to  0.000000
11/2/2010	3:47:08 PM	H2 MFC set to  500.000000
11/2/2010	3:47:08 PM	BCl3 MFC set to  0.000000
11/2/2010	3:47:08 PM	PHl3 MFC set to  0.000000
11/2/2010	3:47:08 PM	SiCl4 MFC set to  0.000000
11/2/2010	3:47:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:47:08 PM	Tube furnace set to 1000
11/2/2010	3:56:49 PM	Helium valve closed
11/2/2010	3:56:49 PM	PH3 valve closed
11/2/2010	3:56:49 PM	Main Vac valve closed
11/2/2010	3:56:49 PM	Bypass valve closed
11/2/2010	3:56:49 PM	H2 valve opened
11/2/2010	3:56:49 PM	BCl3 valve opened
11/2/2010	3:56:49 PM	SiCl4 pre valve opened
11/2/2010	3:56:49 PM	SiCl4 post valve opened
11/2/2010	3:56:49 PM	Bubbler valve opened
11/2/2010	3:56:49 PM	Helium MFC set to  0.000000
11/2/2010	3:56:49 PM	H2 MFC set to  500.000000
11/2/2010	3:56:49 PM	BCl3 MFC set to  10.000000
11/2/2010	3:56:49 PM	PHl3 MFC set to  0.000000
11/2/2010	3:56:49 PM	SiCl4 MFC set to  50.000000
11/2/2010	3:56:49 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	3:56:49 PM	Tube furnace set to 1000
11/2/2010	4:00:17 PM	Helium valve closed
11/2/2010	4:00:17 PM	PH3 valve closed
11/2/2010	4:00:17 PM	Main Vac valve closed
11/2/2010	4:00:17 PM	Bypass valve closed
11/2/2010	4:00:17 PM	H2 valve opened
11/2/2010	4:00:17 PM	BCl3 valve opened
11/2/2010	4:00:17 PM	SiCl4 pre valve opened
11/2/2010	4:00:17 PM	SiCl4 post valve opened
11/2/2010	4:00:17 PM	Bubbler valve opened
11/2/2010	4:00:17 PM	Helium MFC set to  0.000000
11/2/2010	4:00:17 PM	H2 MFC set to  500.000000
11/2/2010	4:00:17 PM	BCl3 MFC set to  10.000000
11/2/2010	4:00:17 PM	PHl3 MFC set to  0.000000
11/2/2010	4:00:17 PM	SiCl4 MFC set to  50.000000
11/2/2010	4:00:17 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	4:00:17 PM	Tube furnace set to 1000
11/2/2010	4:05:17 PM	H2 valve closed
11/2/2010	4:05:17 PM	BCl3 valve closed
11/2/2010	4:05:17 PM	PH3 valve closed
11/2/2010	4:05:17 PM	SiCl4 pre valve closed
11/2/2010	4:05:17 PM	SiCl4 post valve closed
11/2/2010	4:05:17 PM	Main Vac valve closed
11/2/2010	4:05:17 PM	Bypass valve closed
11/2/2010	4:05:17 PM	Helium valve opened
11/2/2010	4:05:17 PM	Bubbler valve opened
11/2/2010	4:05:17 PM	Helium MFC set to  500.000000
11/2/2010	4:05:17 PM	H2 MFC set to  0.000000
11/2/2010	4:05:17 PM	BCl3 MFC set to  0.000000
11/2/2010	4:05:17 PM	PHl3 MFC set to  0.000000
11/2/2010	4:05:17 PM	SiCl4 MFC set to  0.000000
11/2/2010	4:05:17 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	4:05:18 PM	Tube furnace set to 0
11/2/2010	4:25:18 PM	Helium valve closed
11/2/2010	4:25:18 PM	H2 valve closed
11/2/2010	4:25:18 PM	BCl3 valve closed
11/2/2010	4:25:18 PM	PH3 valve closed
11/2/2010	4:25:18 PM	SiCl4 pre valve closed
11/2/2010	4:25:18 PM	SiCl4 post valve closed
11/2/2010	4:25:18 PM	Main Vac valve closed
11/2/2010	4:25:18 PM	Bypass valve closed
11/2/2010	4:25:18 PM	Bubbler valve closed
11/2/2010	4:25:18 PM	Helium MFC set to  0.000000
11/2/2010	4:25:18 PM	H2 MFC set to  0.000000
11/2/2010	4:25:18 PM	BCl3 MFC set to  0.000000
11/2/2010	4:25:18 PM	PHl3 MFC set to  0.000000
11/2/2010	4:25:18 PM	SiCl4 MFC set to  0.000000
11/2/2010	4:25:18 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	4:25:18 PM	Tube furnace set to 0
11/2/2010	4:25:18 PM	Run finished at 4:25 PM
11/2/2010	4:59:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2010	4:59:14 PM	Recipe started at 4:59 PM
11/2/2010	4:59:14 PM	Helium valve closed
11/2/2010	4:59:14 PM	H2 valve closed
11/2/2010	4:59:14 PM	BCl3 valve closed
11/2/2010	4:59:14 PM	PH3 valve closed
11/2/2010	4:59:14 PM	SiCl4 pre valve closed
11/2/2010	4:59:14 PM	SiCl4 post valve closed
11/2/2010	4:59:14 PM	Main Vac valve closed
11/2/2010	4:59:14 PM	Bubbler valve closed
11/2/2010	4:59:14 PM	Bypass valve opened
11/2/2010	4:59:15 PM	Helium MFC set to  0.000000
11/2/2010	4:59:15 PM	H2 MFC set to  0.000000
11/2/2010	4:59:15 PM	BCl3 MFC set to  0.000000
11/2/2010	4:59:15 PM	PHl3 MFC set to  0.000000
11/2/2010	4:59:15 PM	SiCl4 MFC set to  0.000000
11/2/2010	4:59:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	4:59:15 PM	Tube furnace set to 0
11/2/2010	5:00:06 PM	Helium valve closed
11/2/2010	5:00:06 PM	H2 valve closed
11/2/2010	5:00:06 PM	BCl3 valve closed
11/2/2010	5:00:06 PM	PH3 valve closed
11/2/2010	5:00:06 PM	SiCl4 pre valve closed
11/2/2010	5:00:06 PM	SiCl4 post valve closed
11/2/2010	5:00:06 PM	Bubbler valve closed
11/2/2010	5:00:06 PM	Main Vac valve opened
11/2/2010	5:00:06 PM	Bypass valve opened
11/2/2010	5:00:06 PM	Helium MFC set to  0.000000
11/2/2010	5:00:06 PM	H2 MFC set to  0.000000
11/2/2010	5:00:06 PM	BCl3 MFC set to  0.000000
11/2/2010	5:00:06 PM	PHl3 MFC set to  0.000000
11/2/2010	5:00:06 PM	SiCl4 MFC set to  0.000000
11/2/2010	5:00:06 PM	Bypass solenoid MFC set to  0.000000
11/2/2010	5:00:06 PM	Tube furnace set to 0
11/2/2010	5:00:06 PM	Run finished at 5:00 PM
11/2/2010	5:00:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
